Aluminium nitride
OverviewApplicationsStructures and physical propertiesStability and chemical propertiesSynthesisSee also
Epitaxially grown thin film crystalline AlN is used for surface acoustic wave sensors (SAWs) deposited on silicon wafers because of AlN''s piezoelectric properties. Recent advancements in material science have permitted the deposition of piezoelectric AlN films on polymeric substrates, thus enabling the development of flexible SAW devices. One application is an RF filter, widely used in mobile phones, which is called a thin-film bulk acoustic resonator (FBAR). This is a MEMS device that uses aluminium ni